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A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry
(1996-09-01)
Lin, HY
;
Lei, TF
;
Jeng, JJ
;
Pan, CL
;
Chang, CY
A three-dimensional silicon magnetic transducer with symmetric sensitivities in the x-, y- and z-directions and small cross sensitivity has been demonstrated. Devices are based on a design of a vertical Hall structure using the surrounding trench and symmetric design to suppress the cross sensitivity. The fabrication process is simple and can be used as a part of a standard integrated circuit process. The results show that almost equal sensitivities in all three components of magnetic field can be obtained by coating Ni/Co thin films on the backside of the substrates. The cross sensitivity is only 1.3% of the sensitivity.
Network geographic information system for landfill siting
(1997-06-01)
Kao, JJ
;
Lin, HY
;
Chen, WY
;
環境工程研究所
;
Institute of Environmental Engineering
A prototype network geographic information system (GIS) was developed to: (i) improve the effectiveness of a complex municipal solid waste landfill siting procedure; (ii) make siting-related information available to the general public; (iii) assist local environmental protection agencies in maintaining a GIS; and (iv) facilitate the central environmental protection agency in managing, instructing and evaluating the progress of a local siting. Siting analysis is performed with computerized mapping analysis to save time and effort of data processing. A multimedia network interface is provided for 24-hour local or remote access to the system from anywhere on the Internet. This networking capability allows a user without tools to utilize the system and to avoid the cost of system installation and training appropriate personnel to manage the system. Moreover, a case study for Miaoli is described. Environmental, social, economic and engineering feasibility issues are evaluated for the suitability of a candidate landfill site. (C) 1997 ISWA.
Network expert geographic information system for landfill siting
(1996-10-01)
Kao, JJ
;
Chen, WY
;
Lin, HY
;
Guo, SJ
;
環境工程研究所
A prototypical network expert geographic information system (GIS) is developed to facilitate municipal solid waste landfill siting. A forward chaining knowledge base consisting of related siting rules extracted from various literature is used to establish an expert system. Siting analysis is performed by a GIS and evaluated by rules triggered from the expert system. The expert system and GIS are integrated into an expert GIS to combine the advantages of both systems. Also, a multimedia network interface is designed for local or remote access to the system from anywhere on the Internet. With the interface, a general user does not require previous knowledge of the expert system and GIS to use the system. This networking capability not only significantly reduces the cost of distributing tools to each user, but also avoids the difficulty that each user may encounter in installing and managing tools on the computer. Finally, a case study is provided to demonstrate the effectiveness of the developed system in facilitating landfill-siting analysis. The system can be directly accessed via Internet from the home page http://ev004.ev.nctu.edu.tw/ENGLISH/wsite/index.html.
Enhancement of the optical and electrical properties in InGaAlP/InGaP PIN heterostructures by rapid thermal annealing on misoriented substrate
(1996-07-01)
Chin, A
;
Lin, HY
;
Lin, BC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
We have studied the optical and electrical properties of InGaAlP/InGaP PIN heterostructures by the effects of post-growth annealing, substrate misorientation and growth temperature. For the as-grown p-type In-0.5(Ga0.5Al0.5)(0.5)P, the 15 degrees misoriented sample shows the largest hole concentration of 1 x 10(18) cm(-3) as compared to 20 and 10 degrees misoriented samples. After annealing at 900 degrees C for 30 s, the hole concentration increases about three times to 2.6 x 10(18) cm(-3). The increased hole concentration is related to the four times enhanced photoluminescence (PL) intensity. In the In0.6Ga0.4P/In-0.5(Ga0.6Al0.4)(0.5)P stained multiple quantum wells, the post-growth annealing also improves the PL integrated intensity. The PL intensity on an as-grown sample decreases with the increased degree of misorientation, while the PL peak energy increases with the increased degree of misorientation, from 0 degrees, 2 degrees, 10 degrees toward 15 degrees. The PL intensities are larger for samples grown at 760 degrees C than those grown at 700 degrees C. Copyright (C) 1996 Elsevier Science Ltd.
Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors
(1996-11-01)
Lin, HY
;
Chang, CY
;
Lei, TF
;
Liu, FM
;
Yang, WL
A top-gate self-aligned n-channel polycrystalline silicon (poly-Si) thin-film transistor (TFT) has been fabricated with low temperature (less than or equal to 550 degrees C) and low thermal budget process. The ultrahigh vacuum chemical vapor deposition (UHV/CVD) grown poly-Si was served as the channel film, the chemical mechanical polishing (CMP) technique was used to polish the channel surface, plasma-enhanced chemical vapor deposited (PECVD) tetraethylorthosilicate (TEOS) oxide was used as the gate dielectric, and NH3 plasma was used to passive the device. In this process, the solid phase crystallization (SPC) step Is not needed. A field effect mobility of 46 cm(2)/V-s, ON/OFF current ratio of over 10(7), and threshold voltage of 0.8 V are obtained. The significant reduction in process temperature and thermal budget make this process advantageous for larger-area-display peripheral driver circuits on glass substrate.
A vector-based spatial model for landfill siting
(1998-02-01)
Lin, HY
;
Kao, JJ
;
環境工程研究所
;
Institute of Environmental Engineering
An inappropriate landfill site may have negative environmental, economic or ecological impacts. Therefore, landfill siting should carefully consider various factors and regulations and evaluate a significant amount of spatial data. However, processing of spatial information for various siting factors is tedious. Digitized data is thus frequently used for improving data processing and analysis efficiency. Vector-based data are composed of points, lines and polygons, which express gee-referenced attributes of the real world. Compared to raster-based data, although describing real world spatial information more precisely, the lack of uniformity makes vector-based data difficult to use with a mathematical optimization model. In this study, a mixed-integer spatial optimization model is developed based on vector-based data to assist decision makers in finding a suitable site from a siting area. Major factors considered in the model include impacts on the environment, economic efficiency, and site compactness. A sample case is provided to demonstrate the effectiveness of the model. (C) 1998 Elsevier Science B.V.
Comparison of N-2 and NH3 plasma passivation effects on polycrystalline silicon thin-film transistors
(1998-07-01)
Lee, YS
;
Lin, HY
;
Lei, TF
;
Huang, TY
;
Chang, TC
The passivation effects of pure N-2 plasma on polycrystalline silicon (poly-Si) thin-film transistors (TFTs) have been studied and compared with those of NH3 plasma. We found that, similar to the recently-proposed NH3 plasma passivation, N-2 plasma passivation can also effectively improve device parameters such as field effect mobility, threshold voltage subthreshold swing, off current, and on/off current ratio. While the improvement of NH3-passivated devices can be attributed to both hydrogen and nitrogen passivation effects, nitrogen passivation alone is mainly responsible for the improvement of N-2-passivated devices. Zn addition, we round that N-2-passivated devices exhibit much better hot-carrier reliability than NH3-passivated devices. The better hot-carrier reliability of N-2-passivated devices can be explained by the formation of strong Si-N bonds which are difficult to break, while effectively eliminating the weaker N-H bonds, which are inevitable in NH3-passivated devices. The results of a Fourier. transform infrared (FTIR) spectrum analysis performed in this study are consistent with this proposition.
Suppression of fluorine penetration by use of in situ stacked chemical vapor deposited tungsten film
(1999-08-01)
Chang, KM
;
Deng, IC
;
Lin, HY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
In this study, amorphous-like tungsten films were deposited by a chemical vapor deposition (CVD) process. The deposited film has shown reduced resistance compared with WSi2, and it also blocked the fluorine atoms from diffusing into the gate oxide. Furthermore, when the amorphous-like tungsten film was deposited prior to a typical CVD tungsten film with a columnar structure, it not only showed excellent barrier characteristics in impeding fluorine impurities, but its resistance was also substantially lower than a single layer of a-W film. It is also found in our work that a bilayer film containing typical CVD tungsten/amorphsus-like CVD tungsten is a better wordline structure due to its extraordinarily low resistivity and low fluorine contamination. (C) 1999 The Electrochemical Society. S0013-4651(98)11-071-6. All rights reserved.
Enhanced spatial model for landfill siting analysis
(1999-09-01)
Lin, HY
;
Kao, JJ
;
環境工程研究所
;
Institute of Environmental Engineering
A landfill siting analysis typically requires evaluating various rules, factors, constraints, and numerous spatial data. A modern geographical information system, although capable of rapidly processing a massive amount of spatial data, lacks the ability to locate an optimal site when compactness and other factors are simultaneously evaluated. A previously developed grid-based model could not be applied to resolve this inability for irregularly shaped spatial data. Therefore, an enhanced spatial siting model is proposed herein for general spatial data. A compactness index is applied to ensure the integrity of selected sites. Two case studies are presented to demonstrate the applicability of the proposed model. The proposed model and two models developed previously are compared in the first case study based on the single factor of land cost. A single factor model is perhaps quite unacceptable with respect to other factors. The second case study is thus presented to demonstrate the flexibility of the model for considering additional factors, land slope, and road network accessibility. Moreover, results obtained from various models and siting factors are compared and discussed.
Authentication of 3-D polygonal meshes
(2004)
Lin, HY
;
Liao, HYM
;
Lu, CS
;
Lin, JC
;
資訊工程學系
Designing a powerful fragile watermarking technique for authenticating 3-D polygonal meshes is a very difficult task. Yeo and Yeung [17] were first to propose a fragile watermarking method to perform authentication of 3-D polygonal meshes. Although their method can authenticate the integrity of 3-D polygonal meshes, it is unable to distinguish malicious attacks from incidental data processings. In this paper, we propose a new fragile watermarking method which not only is able to detect malicious attacks, but also is immune to incidental data processings. During the process of watermark embedding, mesh parameterization techniques are employed to perturb the coordinates of invalid vertices while cautiously maintaining the appearance of the original model. Since the proposed embedding method is independent of the order of vertices, the hidden watermark is immune to some attacks, such as vertex reordering. In addition, the proposed method can be used to perform region-based tampering detection. The experimental results have shown that the proposed fragile watermarking scheme is indeed powerful.

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