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Item type:Item, Random Telegraph Noise in 1X-nm CMOS Silicide Contacts and a Method to Extract Trap Density(2012-04-01) ;Chen, Min-Cheng ;Lin, Chia-Yi ;Chen, Bo-Yuan ;Lin, Chang-HsienHuang, Guo-WeiThe behavior of random telegraph noise was affected by nickel silicide barrier height engineering in advanced nano-CMOS technologies. Contact resistance fluctuations with magnitude of up to 40% were observed when a Schottky barrier was reduced to 0.2 eV. The large contact resistance instability is attributed to the barrier modification by positive charge trapping and detrapping in a Schottky contact. The prevalence and magnitude of the noise are dependent on the contact area, trap density, trap energy, and the silicide Schottky barrier height. In this letter, we propose a fast method to extract the density of responsible contact traps.Item type:Item, A Comparative Study of NBTI and RTN Amplitude Distributions in High-kappa Gate Dielectric pMOSFETs(2012-02-01) ;Chiu, J. P. ;Chung, Y. T. ;Wang, Tahui ;Chen, Min-ChengLu, C. Y.Random telegraph noise (RTN) and negative bias temperature (NBT) stress-induced threshold voltage (V-t) fluctuations in high-kappa gate dielectric and metal-gate pMOSFETs are investigated. We measured RTN amplitude distributions before and after NBT stress. RTN in poststressed devices exhibits a broader amplitude distribution than the prestress one. In addition, we trace a single trapped charge-induced Delta V-t in NBT stress and find that the average Delta V-t is significantly larger than a Delta V(t)caused by RTN. A 3-D atomistic simulation is performed to compare a single-charge-induced Delta V-t by RTN and NBTI. In our simulation, the probability distribution of a NBT trapped charge in the channel is calculated from the reaction-diffusion model. Our simulation confirms that the NBT-induced Delta V-t indeed has a larger distribution tail than RTN due to a current-path percolation effect.Item type:Item, Program Trapped-Charge Effect on Random Telegraph-Noise Amplitude in a Planar SONOS Flash Memory Cell(2009-11-01) ;Ma, H. C. ;Chou, Y. L. ;Chiu, J. P. ;Wang, TahuiKu, S. H.Program-charge effects in a SONOS Flash cell on the amplitude of random telegraph noise (RTN) are investigated. We measure RTN in 45 planar SONOS cells and 40 floating-gate (FG) cells in erase state and program state, respectively. We find that a SONOS cell has a wide spread in RTN amplitudes after programming, while an FG cell has identical RTN amplitudes in erase and program states at the same read-current level. A 3-D atomistic simulation is performed to calculate RTN amplitudes. Our result shows that the wide spread of program-state RTN amplitudes in a SONOS cell is attributed to a current-path-percolation effect caused by random discrete nitride charges.