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學術出版;;Publications

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收集所有交通大學研究人員與學生個人或團體所發表之各項學術著作，涵蓋期刊論文、教師專書、學位論文等項。;;Collections of Publications of NCTU Researchers and Students Like Journal Papers and Thesis.

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1992 - 19932

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Subject: search.filters.subject.MEASUREMENT

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    POLY-OXIDE POLY-SI/SIO2/SI STRUCTURE FOR ELLIPSOMETRY MEASUREMENT
    (1992-06-04)
    CHAO, TS
    ;
    LEE, CL
    ;
    LEI, TF
    ;
    YEN, YT
    ;
    電子工程學系及電子研究所
    A multiple poly-oxide/poly-Si/SiO2/Si sandwiched structure is proposed for the conventional single incident angle and single wavelength ellipsometry measurement of the thicknesses and refractive indices of the poly-oxide and the poly-Si at the same time. The structure is simple and gives accurate results.
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    Item type:Item,
    THICKNESS DETERMINATION OF POLY-SI/POLY-OXIDE POLY-SI/SIO2/SI STRUCTURE BY ELLIPSOMETER
    (1993-06-24)
    CHAO, TS
    ;
    LEE, CL
    ;
    LEI, TF
    ;
    電控工程研究所
    ;
    Institute of Electrical and Control Engineering
    An ellipsometry measurement method is proposed to measure the poly-Si/poly-oxide/poly-Si/SiO2/Si structure. The thickness of each layer in this structure can be easily obtained by a conventional ellipsometry measurement. The measured result is consistent with that of cross-sectional TEM.