標題: Nano-bubble flotation technology with coagulation process for the cost-effective treatment of chemical mechanical polishing wastewater
作者: Tsai, Jen-Chieh
Kumar, Mathava
Chen, Shen-Yi
Lin, Jih-Gaw
環境工程研究所
Institute of Environmental Engineering
關鍵字: chemical mechanical polishing;coagulation;flotation;nano-bubble;response surface methodology
公開日期: 1-十二月-2007
摘要: The feasibility of nano-bubble flotation technology (NBFT) with coagulation/flocculation process for the enhanced treatment of chemical mechanical polishing (CMP) wastewater was investigated through laboratory and pilot-scale experiments. As a precursor, the effective combination of activator/collector was identified using a laboratory-scale flotation reactor. The results showed that polyaluminum chloride (PAC)/sodium oleate (NaOl) was the best combination of activator/collector, respectively and its application in the NBFT with coagulation process increased the wastewater clarification efficiency by 40% as compared with traditional coagulation/flocculation process. More than 95% turbidity, total solids and total silica removal efficiencies were observed in the pilot-scale flotation experiments. From the results, it was found that NBFT with coagulation process could be performed effectively at an optimum PAC concentration of 50-60 mg/L (as Al), NaOl concentration of 5-10 mg/L with a recycle ratio of 10-20% and I h hydraulic retention time HRT. The cost and performance assessment reflected that CMP wastewater could be treated efficiently at a minimum cost using the present approach. (c) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.seppur.2007.07.022
http://hdl.handle.net/11536/10032
ISSN: 1383-5866
DOI: 10.1016/j.seppur.2007.07.022
期刊: SEPARATION AND PURIFICATION TECHNOLOGY
Volume: 58
Issue: 1
起始頁: 61
結束頁: 67
顯示於類別:期刊論文


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