標題: | A Petri-Net approach to modular supervision with conflict resolution for semiconductor manufacturing systems |
作者: | Lee, Jin Shyan Zhou, MengChu Hsu, Pau Lo 電控工程研究所 Institute of Electrical and Control Engineering |
關鍵字: | human-in-the-loop;modular supervision;Petri nets (PNs);rapid thermal processes;semiconductor manufacturing systems;supervisory control |
公開日期: | 1-十月-2007 |
摘要: | In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach. |
URI: | http://dx.doi.org/10.1109/TASE.2007.905995 http://hdl.handle.net/11536/10266 |
ISSN: | 1545-5955 |
DOI: | 10.1109/TASE.2007.905995 |
期刊: | IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING |
Volume: | 4 |
Issue: | 4 |
起始頁: | 584 |
結束頁: | 588 |
顯示於類別: | 期刊論文 |