標題: A Petri-Net approach to modular supervision with conflict resolution for semiconductor manufacturing systems
作者: Lee, Jin Shyan
Zhou, MengChu
Hsu, Pau Lo
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: human-in-the-loop;modular supervision;Petri nets (PNs);rapid thermal processes;semiconductor manufacturing systems;supervisory control
公開日期: 1-十月-2007
摘要: In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.
URI: http://dx.doi.org/10.1109/TASE.2007.905995
http://hdl.handle.net/11536/10266
ISSN: 1545-5955
DOI: 10.1109/TASE.2007.905995
期刊: IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
Volume: 4
Issue: 4
起始頁: 584
結束頁: 588
顯示於類別:期刊論文


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