Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 李威儀 | en_US |
| dc.contributor.author | 陳奎銘 | en_US |
| dc.contributor.author | 吳尹豪 | en_US |
| dc.contributor.author | 葉彥顯 | en_US |
| dc.date.accessioned | 2014-12-16T06:12:05Z | - |
| dc.date.available | 2014-12-16T06:12:05Z | - |
| dc.date.issued | 2012-07-16 | en_US |
| dc.identifier.govdoc | H01L021/3065 | zh_TW |
| dc.identifier.govdoc | H01L021/306 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/103405 | - |
| dc.description.abstract | 本發明揭露一種平整化氮化物基板的方法,首先選擇獨立式氮化物基板的特定面向,對該面向進行蝕刻,在經過適度的蝕刻時間後,該特定面向的表面會產生特定的形貌,如柱狀或洞狀或平坦狀等結構,從而降低獨立式氮化物基板的翹曲程度以達到平整化氮化物基板的效果。 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 一種平整化氮化物基板的方法 | zh_TW |
| dc.type | Patents | en_US |
| dc.citation.patentcountry | TWN | zh_TW |
| dc.citation.patentnumber | 201230187 | zh_TW |
| Appears in Collections: | Patents | |
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