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dc.contributor.author邱俊誠en_US
dc.contributor.author張志瑋en_US
dc.date.accessioned2014-12-16T06:12:55Z-
dc.date.available2014-12-16T06:12:55Z-
dc.date.issued2009-05-16en_US
dc.identifier.govdocG01R001/073zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/103890-
dc.description.abstract一種三維微探針陣列的組裝結構,利用墊片(spacer)的概念,疊加單片側向式探針成為三維立體結構,並且使每一片側向式探針之導電片皆於墊片露出,使得導線易於連接,而可同時偵測深度與角度,有效的增進感測可靠度,此外,亦可將相關訊號處理積體電路與墊片整合,更可達到整合電路與降低製造成本的優勢。zh_TW
dc.language.isozh_TWen_US
dc.title三維微探針陣列的組裝結構zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber200921109zh_TW
Appears in Collections:Patents


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