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dc.contributor.author邱俊誠en_US
dc.contributor.author張志瑋en_US
dc.date.accessioned2014-12-16T06:13:08Z-
dc.date.available2014-12-16T06:13:08Z-
dc.date.issued2007-12-16en_US
dc.identifier.govdocA61B005/04zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/104031-
dc.description.abstract本發明提供一種具自我固定功能之微探針陣列結構及其製造方法,用以感測各種生理訊號,其特色在於於蝕刻過程中控制蝕刻參數,製作出底部截面積縮小之微探針結構,使微探針可穩固於皮膚組織內,並於微探針上形成一導電層以供感測訊號之用。本發明更提出一種可使微探針間電性分離之設計,使微探針陣列可用於多種生理訊號的量測,同時也可作為刺激源使用。zh_TW
dc.language.isozh_TWen_US
dc.title微探針陣列結構及其製造方法zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber200744534zh_TW
Appears in Collections:Patents


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