標題: | Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor |
作者: | Tsai Chuen-Jinn Chen Sheng-Chieh Chen Hong-Dar |
公開日期: | 1-四月-2014 |
摘要: | A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate. |
官方說明文件#: | C23F001/00 |
URI: | http://hdl.handle.net/11536/104399 |
專利國: | USA |
專利號碼: | 08685262 |
顯示於類別: | 專利資料 |