Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Tsai Chuen-Jinn	en_US
dc.contributor.author	Chen Sheng-Chieh	en_US
dc.contributor.author	Chen Hong-Dar	en_US
dc.date.accessioned	2014-12-16T06:13:53Z	-
dc.date.available	2014-12-16T06:13:53Z	-
dc.date.issued	2014-04-01	en_US
dc.identifier.govdoc	C23F001/00	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104399	-
dc.description.abstract	A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	08685262	zh_TW
顯示於類別：	專利資料

文件中的檔案：

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。