標題: | Low-voltage organic thin film transistors with hydrophobic aluminum nitride film as gate insulator |
作者: | Zan, Hsiao-Wen Yen, Kuo-Hsi Liu, Pu-Kuan Ku, Kuo-Hsin Chen, Chien-Hsun Hwang, Jennchang 光電工程學系 顯示科技研究所 Department of Photonics Institute of Display |
關鍵字: | OTFTs;AIN;pentacene;high-k;sputtering;contact angle;surface energy |
公開日期: | 1-八月-2007 |
摘要: | This paper reports on the low-voltage (< 5 V) pentacene-based organic thin film transistors (OTFTs) with a hydrophobic aluminum nitride (AlN) gate-dielectric. In this work, a thin (about 50 nm), smooth (roughness about 0.18 nm) and low-leakage AlN gate dielectric is obtained and characterized. The AlN film is hydrophobic and the surface free energy is similar to the organic or the polymer films. The demonstrated AlN-OTFTs were operated at a low-voltage (3-5 V). A low-threshold voltage (-2V) and an extremely low-subthreshold swing (similar to 170 mV/dec) were also obtained. Under low-voltage operating conditions, the on/off current ratio exceeded 106, and the field effect mobility was mobility was 1.67 cm(2)/V s.(c) 2006 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.orgel.2006.12.001 http://hdl.handle.net/11536/10457 |
ISSN: | 1566-1199 |
DOI: | 10.1016/j.orgel.2006.12.001 |
期刊: | ORGANIC ELECTRONICS |
Volume: | 8 |
Issue: | 4 |
起始頁: | 450 |
結束頁: | 454 |
顯示於類別: | 期刊論文 |