Miniature inductor suitable for integrated circuits

Abstract

A miniature inductor suitable for integrated circuits comprises a semiconductor substrate having a coplanar strip line and a plurality of metal-insulator-metal (MIM) capacitors, wherein the plurality of MIM capacitors are connected between the transmission lines of the coplanar strip line in parallel, and the coplanar strip line connected with the MIM capacitors further comprises a crossed planar strip line structure or a shifted planar strip line structure. The present invention reduces the occupied area for an inductor by adding the MIM capacitors and folding the transmission lines, and alleviates the quality factor degradation of the inductor caused by substrate loss.