標題: Effects of accumulated laser pulses on (Pb,Sr)TiO(3) films post-excimer laser annealed at low temperatures
作者: Wang, Jyh-Liang
Lai, Yi-Sheng
Chiou, Bi-Shiou
Shye, Der-Chi
Hwang, Chuan-Chou
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-八月-2007
摘要: In this article, we report the effect of excimer laser annealing (ELA) on the characteristics of (Pb,Sr)TiO(3) (PSrT) films. The unirradiated and irradiated films are characterized by atomic force microscope (AFM), X-ray photoelectron spectroscopy, X-ray diffractometer (XRD), transmission electron microscopy (TEM), and electron energy loss spectroscopy (EELS). It is found that the crystallinity is improved and the oxygen content is increased by ELA. Besides, the surface morphology becomes rough after ELA. Moreover, PSrT films irradiated by ELA are found to increase the grain size near the surface. The material properties of unirradiated and irradiated films, as well as the characteristics of PSrT films irradiated with various laser pulses, will be explored in this study. (c) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jcrysgro.2007.05.005
http://hdl.handle.net/11536/10486
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2007.05.005
期刊: JOURNAL OF CRYSTAL GROWTH
Volume: 306
Issue: 1
起始頁: 80
結束頁: 85
顯示於類別:期刊論文