METHOD OF GROWING DIAMOND THIN FILM

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	CHANG Li	en_US
dc.contributor.author	CHEN Yu-Chang	en_US
dc.contributor.author	CHEN Jr-Yu	en_US
dc.date.accessioned	2014-12-16T06:14:46Z	-
dc.date.available	2014-12-16T06:14:46Z	-
dc.date.issued	2014-07-31	en_US
dc.identifier.govdoc	C30B025/18	zh_TW
dc.identifier.govdoc	C30B025/10	zh_TW
dc.identifier.govdoc	C30B025/06	zh_TW
dc.identifier.govdoc	C01B031/06	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104887	-
dc.description.abstract	The present invention is directed to a method of growing thin film diamond. Since there are micro-grooves formed between internal grains of the heterogeneous substrate during lateral epitaxy growth, diamond seeds are allowed to be embedded in the micro-grooves; surface damage caused by scratching method or seeding method also can be prevented. As a result, a continuous diamond thin film with uniform thickness and high quality can be obtained.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	METHOD OF GROWING DIAMOND THIN FILM	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	20140209014	zh_TW
顯示於類別：	專利資料

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