INTELLIGENT ANALYSIS METHOD OF LEAKAGE CURRENT DATA FOR CHIP CLASSIFICATION

Abstract

An intelligent analysis method of leakage current data for chip classification is provided. The analysis method includes steps of: providing a plurality of given patterns to a chip and measuring a plurality of leakage currents of the chip corresponding to the given patterns; finding a minimum value of the leakage currents and deriving an uninfected process parameter according to the minimum value; calculating a plurality of σ-Iddq values based on the uninfected process parameter and the given patterns; and applying a clustering algorithm to the σ-Iddq values to classify whether the chip is a defect-free one. By employing the novel method, it is advantageous of high efficiency and precision without involving any threshold-value determination, visual inspection and/or pattern modification.