標題: SPECIMEN BOX FOR ELECTRON MICROSCOPE
作者: CHEN Chih
TU King-Ning
公開日期: 10-一月-2013
摘要: The present invention relates to a specimen box for an electron microscope, which comprises a first substrate, a second substrate, and a metal adhesion layer. The first substrate has a first surface, a second surface, a first concave, and one or more first through holes, wherein the first through hole penetrates through the first substrate. The second substrate has a third surface, a forth surface, and a second concave. Besides, the metal adhesion layer is disposed between the first substrate and the second substrate to form a space for a specimen placed therein. In addition, the specimen box of the present invention further comprises one or more plugs. When the plug is assembled into the first through hole to seal the specimen box, the in-situ observation can be accomplished by using an electron microscope.
官方說明文件#: H01J037/16
URI: http://hdl.handle.net/11536/105090
專利國: USA
專利號碼: 20130009072
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