標題: | METHOD FOR FABRICATING NANOSCALE THERMOELECTRIC DEVICE |
作者: | CHAO, Chuen-Guang Chen, Jung-Hsuan Yang, Ta-Wei |
公開日期: | 10-三月-2011 |
摘要: | The present invention discloses a method for fabricating a nanoscale thermoelectric device, which comprises steps: providing at least one template having a group of nanoscale pores; forming a substrate on the bottom of the template; injecting a molten semiconductor material into the nanoscale pores to form a group of semiconductor nanoscale wires; removing the substrate to obtain a semiconductor nanoscale wire array; and using metallic conductors to cascade at least two semiconductor nanoscale wire arrays to form a thermoelectric device having a higher thermoelectric conversion efficiency. |
官方說明文件#: | H01L035/34 B82Y040/00 |
URI: | http://hdl.handle.net/11536/105325 |
專利國: | USA |
專利號碼: | 20110059568 |
顯示於類別: | 專利資料 |