標題: Correlation of reaction sites during the chlorine extraction by hydrogen atom from Cl/Si(100)-2X1
作者: Hsieh, Ming-Feng
Chung, Jen-Yang
Lin, Deng-Sung
Tsay, Shiow-Fon
物理研究所
Institute of Physics
公開日期: 21-七月-2007
摘要: The Cl abstraction by gas-phase H atoms from a Cl-terminated Si(100) surface was investigated by scanning tunneling microscopy (STM), high-resolution core level photoemission spectroscopy, and computer simulation. The core level measurements indicate that some additional reactions occur besides the removal of Cl. The STM images show that the Cl-extracted sites disperse randomly in the initial phase of the reaction, but form small clusters as more Cl is removed, indicating a correlation between Cl-extracted sites. These results suggest that the hot-atom process may occur during the atom-adatom collision. (C) 2007 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2752502
http://hdl.handle.net/11536/10552
ISSN: 0021-9606
DOI: 10.1063/1.2752502
期刊: JOURNAL OF CHEMICAL PHYSICS
Volume: 127
Issue: 3
結束頁: 
顯示於類別:期刊論文


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