標題: | Control system for an electrostatically-driven microelectromechanical device |
作者: | Chiou, Jin-Chern Lin, Yu-Chen |
公開日期: | 9-十月-2003 |
摘要: | The present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes Is cut Into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy. |
官方說明文件#: | H02H001/00 |
URI: | http://hdl.handle.net/11536/105787 |
專利國: | USA |
專利號碼: | 20030189807 |
顯示於類別: | 專利資料 |