Title: | Control system for an electrostatically-driven microelectromechanical device |
Authors: | Chiou, Jin-Chern Lin, Yu-Chen |
Issue Date: | 9-Oct-2003 |
Abstract: | The present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes Is cut Into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy. |
Gov't Doc #: | H02H001/00 |
URI: | http://hdl.handle.net/11536/105787 |
Patent Country: | USA |
Patent Number: | 20030189807 |
Appears in Collections: | Patents |
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