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dc.contributor.author張翼en_US
dc.contributor.author張嘉華en_US
dc.contributor.author林岳欽en_US
dc.contributor.author陳宥綱en_US
dc.contributor.author劉世謙en_US
dc.date.accessioned2014-12-16T06:16:27Z-
dc.date.available2014-12-16T06:16:27Z-
dc.date.issued2014-10-21en_US
dc.identifier.govdocH01L029/778zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/105883-
dc.description.abstract一種具有高電子遷移率之氮化鎵電晶體結構,包括一基板、一位於基板上之氮化鎵磊晶層、至少一位於氮化鎵磊晶層上之歐姆接觸層、一位於氮化鎵磊晶層之上的金屬閘極層、以及一位於金屬閘極層與氮化鎵磊晶層之間的擴散阻擋層。利用此一擴散阻擋層,可用以阻擋金屬閘極層之擴散,使得氮化鎵電晶體結構具有較佳之元件特性及可靠度。zh_TW
dc.language.isozh_TWen_US
dc.title具有高電子遷移率之氮化鎵電晶體結構zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumberI458092zh_TW
Appears in Collections:Patents


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