Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 劉安誠 | en_US |
dc.contributor.author | 陳仁浩 | en_US |
dc.contributor.author | 陳悅婷 | en_US |
dc.date.accessioned | 2014-12-16T06:17:17Z | - |
dc.date.available | 2014-12-16T06:17:17Z | - |
dc.date.issued | 2006-02-11 | en_US |
dc.identifier.govdoc | H01L021/68 | zh_TW |
dc.identifier.govdoc | H01L021/68 | zh_TW |
dc.identifier.uri | http://hdl.handle.net/11536/106343 | - |
dc.description.abstract | 本發明係一種晶片挾持器之改良結構,其係由下而上依序在旋轉主軸上套設錐軸襯套、錐孔襯套及晶片挾持平台,旋轉主軸藉由錐軸襯套與錐孔襯套傳遞扭矩給晶片挾持平台,由於錐軸襯套與錐孔襯套之間的配合方式,係藉由二者間相對應之錐面密合,利用斜面縮短間隙距離和圓形半徑方向對稱觀念來校正中心和密閉效果,可大幅降低一般晶片塗佈製程在高轉速的平面跳動,對於製程設計彈性有很大的助益,品質良率亦可信賴,並且提高可分離式晶片挾持器內部改良結構的壽命。 | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.title | 晶片挾持器之改良結構 | zh_TW |
dc.type | Patents | en_US |
dc.citation.patentcountry | TWN | zh_TW |
dc.citation.patentnumber | I249221 | zh_TW |
Appears in Collections: | Patents |
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