Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 邱俊誠 | en_US |
dc.contributor.author | 林育成 | en_US |
dc.date.accessioned | 2014-12-16T06:17:31Z | - |
dc.date.available | 2014-12-16T06:17:31Z | - |
dc.date.issued | 2003-01-11 | en_US |
dc.identifier.govdoc | B81B003/00 | zh_TW |
dc.identifier.govdoc | B81B003/00 | zh_TW |
dc.identifier.uri | http://hdl.handle.net/11536/106467 | - |
dc.description.abstract | 本發明有關一種靜電驅動微機電裝置之控制系統,其利用多塊電極板來控制靜電驅動微機電裝置,亦即,將熟知兩平行板驅動電極之電容器的下方驅動電極板切割為若干小的電極板,藉選擇用於所企望之靜電力的電極板圖案,可根據不同的應用改變裝置之非線性而取得諸如線性驅動,數位驅動,或最佳化驅動之特性,使能在裝置具有有限精確度之先天限制下達成高度的操作精確性。 | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.title | 靜電驅動微機電裝置之控制系統 | zh_TW |
dc.type | Patents | en_US |
dc.citation.patentcountry | TWN | zh_TW |
dc.citation.patentnumber | 00517042 | zh_TW |
Appears in Collections: | Patents |
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