標題: A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry
作者: Lin, HY
Lei, TF
Jeng, JJ
Pan, CL
Chang, CY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: magnetic transducers;silicon;symmetric sensitivity
公開日期: 1-Sep-1996
摘要: A three-dimensional silicon magnetic transducer with symmetric sensitivities in the x-, y- and z-directions and small cross sensitivity has been demonstrated. Devices are based on a design of a vertical Hall structure using the surrounding trench and symmetric design to suppress the cross sensitivity. The fabrication process is simple and can be used as a part of a standard integrated circuit process. The results show that almost equal sensitivities in all three components of magnetic field can be obtained by coating Ni/Co thin films on the backside of the substrates. The cross sensitivity is only 1.3% of the sensitivity.
URI: http://dx.doi.org/10.1016/S0924-4247(96)01323-4
http://hdl.handle.net/11536/1083
ISSN: 0924-4247
DOI: 10.1016/S0924-4247(96)01323-4
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 56
Issue: 3
起始頁: 233
結束頁: 237
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