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dc.contributor.authorYang, Ching-Jungen_US
dc.contributor.authorChen, Chilien_US
dc.contributor.authorWu, Pu-Weien_US
dc.contributor.authorShieh, Jia-Minen_US
dc.contributor.authorWang, Shun-Minen_US
dc.contributor.authorLiang, Shih-Weien_US
dc.date.accessioned2014-12-08T15:14:23Z-
dc.date.available2014-12-08T15:14:23Z-
dc.date.issued2007-04-01en_US
dc.identifier.issn0884-2914en_US
dc.identifier.urihttp://dx.doi.org/10.1557/jmr.2007.0143en_US
dc.identifier.urihttp://hdl.handle.net/11536/10976-
dc.description.abstractOrdered arrays of Ta(2)O(5) nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 mu m) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta(2)O(5), X-ray diffraction demonstrated the amorphous characteristic of Ta(2)O(5). As shown in field-emission scanning electron microscopy and transmission electron results, the Ta(2)O(5) nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.en_US
dc.language.isoen_USen_US
dc.titleFabrication of ordered Ta(2)O(5) nanodots using an anodic aluminum oxide template on Si substrateen_US
dc.typeArticleen_US
dc.identifier.doi10.1557/jmr.2007.0143en_US
dc.identifier.journalJOURNAL OF MATERIALS RESEARCHen_US
dc.citation.volume22en_US
dc.citation.issue4en_US
dc.citation.spage1064en_US
dc.citation.epage1071en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000245489400032-
dc.citation.woscount4-
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