A micromirror with large static rotation and vertical actuation

doi:10.1109/JSTQE.2007.892069

Full metadata record

DC Field	Value	Language
dc.contributor.author	Chiou, Jin-Chern	en_US
dc.contributor.author	Kou, Chin-Fu	en_US
dc.contributor.author	Lin, Yung-Jiun	en_US
dc.date.accessioned	2014-12-08T15:14:38Z	-
dc.date.available	2014-12-08T15:14:38Z	-
dc.date.issued	2007-03-01	en_US
dc.identifier.issn	1077-260X	en_US
dc.identifier.uri	http://dx.doi.org/10.1109/JSTQE.2007.892069	en_US
dc.identifier.uri	http://hdl.handle.net/11536/11093	-
dc.description.abstract	A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mu m, respectively.	en_US
dc.language.iso	en_US	en_US
dc.subject	microelectromechanical systems (MEMS)	en_US
dc.subject	micromirror	en_US
dc.subject	microoptoelectromechanical systems (MOEMS)	en_US
dc.subject	prestress comb drive actuator (PCA)	en_US
dc.title	A micromirror with large static rotation and vertical actuation	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1109/JSTQE.2007.892069	en_US
dc.identifier.journal	IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS	en_US
dc.citation.volume	13	en_US
dc.citation.issue	2	en_US
dc.citation.spage	297	en_US
dc.citation.epage	303	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:000246123200022	-
dc.citation.woscount	11	-
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