标题: Fabrication of anodic aluminum oxide film on large-area glass substrate
作者: Yang, Ching-Jung
Liang, Shih-Wei
Wu, Pu-Wei
Chen, Chih
Shieh, Jia-Min
材料科学与工程学系
Department of Materials Science and Engineering
公开日期: 2007
摘要: Fabrication of anodic aluminum oxide (AAO) on 4 in. glass substrate was demonstrated. Using unique structure with quadruple contacts as electrode support during anodization, we reported gradual transformation from opaque aluminum to transparent AAO over the entire substrate. In contrast, partial transformation was observed with typical single contact approach where growth of insulating AAO inhibited subsequent anodization by interrupting current flow from the contact point. Results from optical spectroscope revealed moderate reduction in transmittance after AAO formation. Successful development of large-area AAO on glass substrate opens up opportunities for AAO templated devices that require a large footprint. (c) 2007 The Electrochemical Society.
URI: http://hdl.handle.net/11536/11410
http://dx.doi.org/10.1149/1.2789777
ISSN: 1099-0062
DOI: 10.1149/1.2789777
期刊: ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume: 10
Issue: 12
起始页: C69
结束页: C71
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