Title: | Preparation of large area and investigation of initial film growth of YBa2Cu3O7 by scanning pulsed laser deposition |
Authors: | Wu, KH Wang, RC Chen, SP Lin, HC Juang, JY Uen, TM Gou, YS 交大名義發表 電子物理學系 National Chiao Tung University Department of Electrophysics |
Issue Date: | 15-Jul-1996 |
Abstract: | A pulsed laser deposition system with a rotating reflector, which can generate an extended plume with a diameter of about 40 mm, has been proven to be viable in producing large area YBa2Cu3O7 (YBCO) thin films. Films with uniformity of thickness and electrical properties to within a few percents were obtained. By making a further modification on this laser scanning system, YBCO films with various thicknesses can be deposited in situ on several pieces of substrates under essentially identical deposition conditions, and particularly, in a continuous fashion. The atomic force microscopy (AFM) images reveal that films grown on NdGaO3 follow the Stranski-Krastanov (layer then island growth) mode, while films grown on as-polished MgO and on annealed MgO follow the Volmer-Weber (islands without layer growth) mode and step-flow mode, respectively. (C) 1996 American Institute of Physics. |
URI: | http://hdl.handle.net/11536/1161 |
ISSN: | 0003-6951 |
Journal: | APPLIED PHYSICS LETTERS |
Volume: | 69 |
Issue: | 3 |
Begin Page: | 421 |
End Page: | 423 |
Appears in Collections: | Articles |