Title: | 單晶銅、其製備方法及包含其之基板 |
Authors: | 陳智 杜經寧 呂佳凌 |
Issue Date: | 1-Mar-2015 |
Abstract: | 本發明係有關於一種單晶銅,其具有[100]方向,且體積係介於0.1~4.0×10 6 μm 3 。本發明更提供一種單晶銅之製備方法及包含其之基板。 The present invention relates to a Cu single crystal having [100] crystal orientation and a volume of 0.1~ 4.0×10 6 μm 3 . The present invention further provides a manufacturing method for Cu single crystals and a substrate comprising the same. |
Gov't Doc #: | C25D003/38 C30B029/02 |
URI: | http://hdl.handle.net/11536/122781 |
Patent Country: | TWN |
Patent Number: | 201508099 |
Appears in Collections: | Patents |
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