單晶銅、其製備方法及包含其之基板

Abstract

本發明係有關於一種單晶銅，其具有[100]方向，且體積係介於0.1~4.0×10 6 μm 3 。本發明更提供一種單晶銅之製備方法及包含其之基板。 The present invention relates to a Cu single crystal having [100] crystal orientation and a volume of 0.1~ 4.0×10 6 μm 3 . The present invention further provides a manufacturing method for Cu single crystals and a substrate comprising the same.