完整後設資料紀錄
DC 欄位語言
dc.contributor.authorChang, Hui Linen_US
dc.contributor.authorFang, Jau Shiungen_US
dc.contributor.authorKuo, Cheng Tzuen_US
dc.date.accessioned2015-07-21T08:27:56Z-
dc.date.available2015-07-21T08:27:56Z-
dc.date.issued2003-12-01en_US
dc.identifier.issn1606-5131en_US
dc.identifier.urihttp://hdl.handle.net/11536/124009-
dc.description.abstractSi-C-N films were synthesized on Si substrates by microwave plasma chemical vapor deposition (MPCVD) with a mixture of CH4 and N-2 as gaseous sources, and Co-coated Si columns to act as a catalyst and an additional Si source. Two conditions, conditions 1 and 2, were implemented by varying the time at which the solid sources were introduced. Under condition 1, the solid sources were applied \'before\' film deposition. Under condition 2, the solid sources were applied both \'before and during\' film depositions. Analytical results indicate, although that both conditions yield crystalline Si-C-N films, the time at which the solid sources are applied is critically affects the films\' structures and properties. Synthesizing Si-C-N films under condition 1 yields crystals with more re-nucleation, a structure closer to a pseudo T-Si3N4 structure, a higher C content, detectable Si(2p)-C bonding, lower nano-hardness and better field emission properties. Synthesis of film under condition 2 yields, crystals with more facets, a structure closer to pseudo alpha-Si3N4 and an additional thin layer under the crystalline layer. SEM, TEM, XPS, XRD, nanoindentor and field emission were used to characterize the film\' structures and properties.en_US
dc.language.isoen_USen_US
dc.titleSTRUCTURES AND PROPERTIES OF THE CRYSTALLINE Si-C-N USING ADDITIONAL Si-SOURCE AND Co-CATALYSTen_US
dc.typeArticleen_US
dc.identifier.journalREVIEWS ON ADVANCED MATERIALS SCIENCEen_US
dc.citation.spage432en_US
dc.citation.epage439en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000209160700006en_US
dc.citation.woscount2en_US
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