標題: | Extraction of optical constants from maxima of fringing reflectance spectra |
作者: | Yen, Shun-Tung Chung, Pei-Kang 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-二月-2015 |
摘要: | We propose a scheme to extract the refractive index and the extinction coefficient of dielectrics. The extraction needs only a reflectance spectrum with reliable successive maxima of fringing oscillations measured from a dielectric film that is either freestanding or on metal. With the film thickness known in advance, we determine the refractive index spectrum from the fringing oscillation periods and then the extinction coefficient spectrum from the upper envelope. The method is demonstrated to work well for GaAs and Ge. (C) 2015 Optical Society of America |
URI: | http://dx.doi.org/10.1364/AO.54.000663 http://hdl.handle.net/11536/124347 |
ISSN: | 1559-128X |
DOI: | 10.1364/AO.54.000663 |
期刊: | APPLIED OPTICS |
Volume: | 54 |
起始頁: | 663 |
結束頁: | 668 |
顯示於類別: | 期刊論文 |