Femtosecond laser processing of indium-tin-oxide thin films

Abstract

Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of similar to 1.4 mu m, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width similar to 900 nm, i.e. similar to 1/8 of the focused beam\'s diameter (7 mu m at 1/e(2)). (C) 2015 Elsevier Ltd. All rights reserved.