標題: Femtosecond laser processing of indium-tin-oxide thin films
作者: Cheng, C. W.
Lee, I. M.
Chen, J. S.
機械工程學系
Department of Mechanical Engineering
關鍵字: Femtosecond laser;Indium-tin-oxide;Crystallization;Nano-scale
公開日期: 1-六月-2015
摘要: Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of similar to 1.4 mu m, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width similar to 900 nm, i.e. similar to 1/8 of the focused beam\'s diameter (7 mu m at 1/e(2)). (C) 2015 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.optlaseng.2015.01.011
http://hdl.handle.net/11536/124440
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2015.01.011
期刊: OPTICS AND LASERS IN ENGINEERING
Volume: 69
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