標題: | Femtosecond laser processing of indium-tin-oxide thin films |
作者: | Cheng, C. W. Lee, I. M. Chen, J. S. 機械工程學系 Department of Mechanical Engineering |
關鍵字: | Femtosecond laser;Indium-tin-oxide;Crystallization;Nano-scale |
公開日期: | 1-六月-2015 |
摘要: | Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of similar to 1.4 mu m, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width similar to 900 nm, i.e. similar to 1/8 of the focused beam\'s diameter (7 mu m at 1/e(2)). (C) 2015 Elsevier Ltd. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.optlaseng.2015.01.011 http://hdl.handle.net/11536/124440 |
ISSN: | 0143-8166 |
DOI: | 10.1016/j.optlaseng.2015.01.011 |
期刊: | OPTICS AND LASERS IN ENGINEERING |
Volume: | 69 |
顯示於類別: | 期刊論文 |