Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lai, Ying-Yu | en_US |
dc.contributor.author | Matsutani, Akihiro | en_US |
dc.contributor.author | Lu, Tien-Chang | en_US |
dc.contributor.author | Wang, Shing-Chung | en_US |
dc.contributor.author | Koyama, Fumio | en_US |
dc.date.accessioned | 2019-04-03T06:47:41Z | - |
dc.date.available | 2019-04-03T06:47:41Z | - |
dc.date.issued | 2015-01-01 | en_US |
dc.identifier.isbn | 978-1-62841-462-2 | en_US |
dc.identifier.issn | 0277-786X | en_US |
dc.identifier.uri | http://dx.doi.org/10.1117/12.2077391 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/125097 | - |
dc.description.abstract | We designed and fabricated a suspended SiC-based membrane high contrast grating (HCG) reflectors. The rigorous coupled-wave analysis (RCWA) was employed to verify the structural parameters including grating periods, grating height, filling factors and air-gap height. From the optimized simulation results, the designed SiC-based membrane HCG has a wide reflection stopband (reflectivity (R) > 90%) of 135 nm for the TE polarization, which centered at 480 nm. The suspended SiC-based membrane HCG reflectors were fabricated by nanoimprint lithography and two-step etching technique. This achievement should have an impact on numerous III-N based photonic devices operating in the blue wavelength or even ultraviolet region. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | SiC | en_US |
dc.subject | HCG | en_US |
dc.subject | Nanoimprint | en_US |
dc.subject | III-N | en_US |
dc.title | Fabrication of SiC Membrane HCG Blue Reflector Using Nanoimprint Lithography | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.doi | 10.1117/12.2077391 | en_US |
dc.identifier.journal | HIGH CONTRAST METASTRUCTURES IV | en_US |
dc.citation.volume | 9372 | en_US |
dc.citation.spage | 0 | en_US |
dc.citation.epage | 0 | en_US |
dc.contributor.department | 光電工程學系 | zh_TW |
dc.contributor.department | Department of Photonics | en_US |
dc.identifier.wosnumber | WOS:000353321800003 | en_US |
dc.citation.woscount | 1 | en_US |
Appears in Collections: | Conferences Paper |
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