石墨烯應變感測器製作於聚二甲基矽氧烷軟性基板

Abstract

本研究旨在製作石墨烯(graphene)應變感測器，其材料使用化學氣相沉積方法所製備而成的石墨烯轉印到可撓性基板PDMS上。使用拉曼儀器判斷石墨烯的層數，最後藉由拉伸試驗機量測應變感測器而得到應變計因數(gauge factor)，此因數數值可代表感測器的靈敏度，而判斷石墨烯應變感測器是否為高性能感測器。另外我們還針對石墨烯應變感測器做了彎曲感測及壓力感測實驗，使石墨烯應變感測器在未來有更多廣泛應用可能性。 在感測器基板上，我們採用聚二甲基矽氧烷(Polydimethylsiloxane‚ PDMS)，其為一種高分子有機矽化合物，固態的PDMS具有無毒、疏水性(hydrophobic)、透光性佳，且具有彈性。在未來石墨烯應變感測器應用上可製作成人體相關感測器，如血壓計等應用。

This study was designed to fabricate graphene strain sensors, prepared from the material transfer of chemical vapor deposition - grown graphene onto a flexible PDMS substrate. Raman Spectroscopy determines the number of layers of graphene, and finally using a tensile testing instrument to measure the gauge factor of graphene strain sensors. In addition, we also test the sensitivity of the graphene strain sensor in bending and also under normal pressure, which makes graphene strain sensors widely used in future to have more possibilities. In order to make the sensor on flexible substrates, polydimethylsiloxane (PDMS) is used, which is a high molecular organic silicon compound with the properties, like non-toxic, hydrophobic, transparent and having elasticity. In future, graphene strain sensors could be used into biomedical application, such as blood pressure monitors.