利用石墨烯結合金屬奈米結構研究兆赫波段之表面電漿極化子共振現象

Abstract

本論文使用半導體製程於矽晶圓基板上備製金屬光柵奈米結構，並結合單層石墨烯完成電漿波導。石墨烯具有優異的載子遷移率（Mobility），此特性配合光柵奈米結構可以由特定之頻率激發產生表面電漿共振現象。並利用兆赫時域解析頻譜系統（THz Time-domain spectroscopy）進行表面電漿共振（surface planmon resonance）現象之研究。並且本論文將由馬克斯威爾方程式出發建立理論模型並進行預測，最後與實驗量測值進行比較映證，進而瞭解電漿波導之光電性值以及未來之應用潛力。其中表面電漿共振之效應將可以藉由觀察兆赫波之穿透頻譜上的強度變化得知。

Graphene has very good mobility and great tunability in the THz spectral region. These properties make graphene a perfect material for the study of surface plasmon resonance. In this thesis, we prepare a graphene-metal nano structure and investigate the surface plasmon resonance of graphene using Terahertz Time-domain spectroscopy measurement. First, we predict the surface plasmon resonance frequency from the theoretical model based on Maxwell equations then we compare the results of experiment with the theoretical prediction of the model.