矽基片B型抗諧振反射光波導滑輪操場環形共振陷頻濾波器之設計,製作和特性量測

Abstract

本論文研究B型抗諧振反射光波導(ARROW-B)滑輪操場環形共振陷頻濾波器元件，利用滑輪操場型的環型共振增加耦合長度獲得更高的消光比來在光通訊中做使用。由於B型抗諧振反射光波導擁有較大的導光區，所以能夠有效和單模光纖相匹配。在此濾波器元件的設計中，我們使用數值模擬和分析光場在元件中的傳播特性，使其在空氣環境下在 C band 濾出高品質因子及高消光比的波。我們利用轉移矩陣法與等效折射係數法分析與設計B型抗諧振反射光波導結構。然後，利用二維有限時域差分法模擬B型抗諧振反射光波導環形共振陷頻濾波器的傳播特性。我們設計了環型半徑為6.7微米的環型共振元件，模擬得到的消光比和自由光譜範圍為 19dB和 25.1奈米。製作出的B型抗諧振反射光波導環形共振濾波器元件所量測到的消光比約為9 dB 而自由光譜範圍則大於20奈米。

In this study, pulley-racetrack ring resonator notch filters with antiresonant reflecting optical waveguide of B-type (ARROW-B) structures have been investigated. The ARROW-B pulley-racetrack ring resonator notch filter increased the coupling length to get higher extinction ratio in the C band. The ARROW-B waveguide with a thick guiding region can provide efficient coupling with a single-mode fiber. The characteristics of ARROW-B structure were analyzed with the transfer matrix method and the effective index method. We used the 2D-FDTD (finite-difference time-domain) method to simulate the propagation characteristics of ARROW-B pulley-racetrack ring resonator notch filter. We chose the radius as 6.7 μm. The extinction ratio found from the simulation was about 19 dB, and free spectral range was 25.1. The ARROW-B pulley-type racetrack ring resonator notch filter were fabricated and characterized. The extinction ratio and FSR of the fabricated ARROW-B pulley-type racetrack ring resonator notch filter was obtained as 9 dB and more than 20 nm, respectively.