單光子累增崩潰二極體之平行輸出影像陣列

Abstract

在此論文中我們運用了台積電的0.18微米標準製程所製作的單光子累增崩潰二極體(Single Photon Avalanche Diodes, SPADs)元件，搭配被動截止、主動恢復電路實現一個12X12像素的平行輸出影像陣列。我們也建立了SPAD陣列的讀取介面，在此系統中先利用FPGA來計數訊號，再利用RS232進行資料傳輸，最後以Labview軟體呈現影像。此影像陣列擁有好的均勻度，平均暗計數為8082.82赫茲，平均光偵測率為2.97%。影像陣列大小為1.2X1.2平方毫米，填充因子為1.61%，成像功能則由成像一個市售的0.36英吋紅光七段顯示器來驗證。

In this work, we realize a 12X12 pixels parallel output image array with a single photon avalanche diodes (SPADs) by using TSMC 0.18μm technology and by applying the passive-quenching active-reset circuit. We also build a read out interface for the SPAD array. In the system, FPGA and RS232 are used for signal counting and data transmission, and Labview software is for measured image display. The SPADs array has a good device uniformity with the mean dark count rate of 8082.87 Hz and with the mean photon detection efficiency of 2.97 %. The size of fabricated image array is 1.2X1.2 mm2, and its fill factor is 1.61%. The imaging function is demonstrated by taking a picture of a ready-made 0.36 inch red light seven segment.