標題: | Transferring-free and large-area graphitic carbon film growth by using molecular beam epitaxy at low growth temperature |
作者: | Lin, Meng-Yu Wang, Cheng-Hung Pao, Chun-Wei Lin, Shih-Yen 顯示科技研究所 Institute of Display |
關鍵字: | Molecular beans epitaxy;Semiconducting materials |
公開日期: | 1-Sep-2015 |
摘要: | Graphitic carbon films prepared by using molecular beam epitaxy (MBE) on metal templates with different thicknesses deposited on SiO2/Si substrates are investigated in this paper. With thick Cu templates, only graphitic carbon flakes are obtained near the Cu grain boundaries at low growth temperatures on metal/SiO2 interfaces. By replacing the Cu templates with thin Ni templates, complete graphitic carbon films with superior crystalline quality is obtained at 600 degrees C on SiO2/Si substrates after removing the Ni templates. The enhanced attachment of the graphitic carbon film to the SiO2/Si substrates with reduced Ni thickness makes the approach a promising approach for transferring-free graphene preparation at low temperature by using MBE. (C) 2015 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.jcrysgro.2015.02.039 http://hdl.handle.net/11536/127833 |
ISSN: | 0022-0248 |
DOI: | 10.1016/j.jcrysgro.2015.02.039 |
期刊: | JOURNAL OF CRYSTAL GROWTH |
Volume: | 425 |
起始頁: | 177 |
結束頁: | 180 |
Appears in Collections: | Articles |