標題: Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation
作者: Lin, Hung-Ruei
Cheng, Chiao-Hua
Hung, Shao-Kang
機械工程學系
Department of Mechanical Engineering
關鍵字: Nanopositioner;Flexure mechanism;Parasitic rotation
公開日期: 1-十月-2015
摘要: This paper presents a particular mechanism design which is inherently inclined to have no parasitic rotation. The flexure-based stage comprises symmetric flexure guiding mechanism and two piezoelectric stack actuators. The layout of the stage is evaluated by finite element analysis, and the results indicate that the proposed design exhibits ultralow parasitic rotation. A prototype of the stage is then fabricated, and its performance is tested. Experimental results show that the stage has a stroke of 500 mu m x 500 mu m and the crosstalk is less than 1%. The maximum parasitic rotation is +/- 1.2 arcsec at a stroke of 500 mu m. (C) 2015 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.mechatronics.2015.08.003
http://hdl.handle.net/11536/129589
ISSN: 0957-4158
DOI: 10.1016/j.mechatronics.2015.08.003
期刊: MECHATRONICS
Volume: 31
起始頁: 180
結束頁: 188
顯示於類別:期刊論文