Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 布力汗 | zh_TW |
dc.contributor.author | Putikam Raghunath | en_US |
dc.date.accessioned | 2016-03-28T08:17:53Z | - |
dc.date.available | 2016-03-28T08:17:53Z | - |
dc.date.issued | 2015 | en_US |
dc.identifier.govdoc | MOST103-2113-M009-011-MY2 | zh_TW |
dc.identifier.uri | http://hdl.handle.net/11536/130531 | - |
dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=11275664&docId=456412 | en_US |
dc.description.sponsorship | 科技部 | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.title | SiHx (x=1-4)矽薄膜沉積的天然氣表面反應 | zh_TW |
dc.title | Gas-Surface Reactions of SiHx (X=1-4) in Si-Thin Film Deposition | en_US |
dc.type | Plan | en_US |
dc.contributor.department | 國立交通大學應用化學系(所) | zh_TW |
Appears in Collections: | Research Plans |