標題: Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry
作者: Hsu, CC
Lee, JY
Su, DC
光電工程學系
Department of Photonics
關鍵字: optical constants;interferometry;thickness monitoring
公開日期: 22-十一月-2005
摘要: in this article, we report an alternative method for in situ monitoring of the thickness and refractive index of thin film during the growth process. We design a special structure with a thickness-controlled air film to simulate the process of thin film growth. The phase term of the reflected light coming from this multi-layer structure is modulated and has a strong correlation with the thickness and optical constant of the thin air film within this structure. Based on the phase demodulated technique and the multiple beam reflection theory under the specific oblique incident angle, the thickness and refractive index of thin film can be measured with a single configuration. According to the theoretical prediction, the resolution of the thickness determination of the thin film should be better than 0.05 nm. (c) 2005 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2005.05.037
http://hdl.handle.net/11536/13058
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.05.037
期刊: THIN SOLID FILMS
Volume: 491
Issue: 1-2
起始頁: 91
結束頁: 95
顯示於類別:期刊論文


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