亳微米元件電子束曝光精確度之研究

Full metadata record

DC Field	Value	Language
dc.contributor.author	中村一光	zh_TW
dc.contributor.author	張俊	zh_TW
dc.date.accessioned	2016-12-20T03:57:06Z	-
dc.date.available	2016-12-20T03:57:06Z	-
dc.date.issued	1993	en_US
dc.identifier.govdoc	NSC82-0404-E009-202	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=45897&docId=6590	en_US
dc.identifier.uri	http://hdl.handle.net/11536/132157	-
dc.description.abstract		zh_TW
dc.description.abstract		en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject		zh_TW
dc.subject		en_US
dc.title	亳微米元件電子束曝光精確度之研究	zh_TW
dc.title	An Improrement of He Electron Beam Exposure Accruacy	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子研究所	zh_TW
Appears in Collections:	Research Plans