Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 中村一光 | zh_TW |
dc.contributor.author | 張俊 | zh_TW |
dc.date.accessioned | 2016-12-20T03:57:06Z | - |
dc.date.available | 2016-12-20T03:57:06Z | - |
dc.date.issued | 1993 | en_US |
dc.identifier.govdoc | NSC82-0404-E009-202 | zh_TW |
dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=45897&docId=6590 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/132157 | - |
dc.description.abstract | zh_TW | |
dc.description.abstract | en_US | |
dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.subject | zh_TW | |
dc.subject | en_US | |
dc.title | 亳微米元件電子束曝光精確度之研究 | zh_TW |
dc.title | An Improrement of He Electron Beam Exposure Accruacy | en_US |
dc.type | Plan | en_US |
dc.contributor.department | 交通大學電子研究所 | zh_TW |
Appears in Collections: | Research Plans |