標題: | A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor With Parallel Design |
作者: | Cheng, Chiao-Hua Hung, Shao-Kang 機械工程學系 Department of Mechanical Engineering |
關鍵字: | Inertiamotor;nanopositioner;piezoelectric element;stepping motor;stick-slip |
公開日期: | 八月-2016 |
摘要: | This letter proposes a parallel design for a piezoelectric two-degree-of-freedom nanostepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serialmechanism, parallel designs are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04 degrees/infinite, respectively. |
URI: | http://dx.doi.org/10.1109/TMECH.2015.2502266 http://hdl.handle.net/11536/134011 |
ISSN: | 1083-4435 |
DOI: | 10.1109/TMECH.2015.2502266 |
期刊: | IEEE-ASME TRANSACTIONS ON MECHATRONICS |
Volume: | 21 |
Issue: | 4 |
起始頁: | 2197 |
結束頁: | 2199 |
顯示於類別: | 期刊論文 |