標題: Fabrication of Microlens Arrays by Using Nano-Particle Fluid Imprinting Technology
作者: Weng, Yung-Jin
Weng, Yung-Chun
Huang, Jen-Ching
Wong, Yong-Cheng
Yang, Sen-Yeu
Liu, Hsu-Kang
機械工程學系
Department of Mechanical Engineering
關鍵字: PDMS soft mold;Conformal contact;Fluid Imprinting;Residual layer
公開日期: 2009
摘要: In this study, we look into an innovative technology which utilizes nano-particles as a medium for imprinting. This technology integrates the advantages of soft lithography, photo-cure resist, and gas assisted imprinting. We try to produce micro-lens arrays by gas-assisted nano-particles based soft mould imprinting on photo-cure resists. It helps the application and technology of nano-imprinting becoming more sophisticated. We rind that PDMS can be used to precisely replicate micro-to-nano-meter level micro-structures. Together with nano-particles and well-proportioned gas pressure, we can construct a perfect shape of micro-structures and achieve a conformal contact with the surface of base material. It increases the effective imprinting area significantly and improves the replication capability of the transfer. Meanwhile, the PDMS soft mould is easy for production and fast in replication, which reduces the cost remarkably. Furthermore, it has a low surface free energy and low viscosity to the resists. Integrating gas assisted nano-particles imprinting can be a great advantage in the process of micro-structure.
URI: http://dx.doi.org/10.1109/ICSPS.2009.188
http://hdl.handle.net/11536/135014
ISBN: 978-0-7695-3654-5
DOI: 10.1109/ICSPS.2009.188
期刊: PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS
起始頁: 963
結束頁: +
Appears in Collections:Conferences Paper