完整後設資料紀錄
DC 欄位語言
dc.contributor.authorWeng, Yung-Jinen_US
dc.contributor.authorWeng, Yung-Chunen_US
dc.contributor.authorHuang, Jen-Chingen_US
dc.contributor.authorWong, Yong-Chengen_US
dc.contributor.authorYang, Sen-Yeuen_US
dc.contributor.authorLiu, Hsu-Kangen_US
dc.date.accessioned2017-04-21T06:49:36Z-
dc.date.available2017-04-21T06:49:36Z-
dc.date.issued2009en_US
dc.identifier.isbn978-0-7695-3654-5en_US
dc.identifier.urihttp://dx.doi.org/10.1109/ICSPS.2009.188en_US
dc.identifier.urihttp://hdl.handle.net/11536/135014-
dc.description.abstractIn this study, we look into an innovative technology which utilizes nano-particles as a medium for imprinting. This technology integrates the advantages of soft lithography, photo-cure resist, and gas assisted imprinting. We try to produce micro-lens arrays by gas-assisted nano-particles based soft mould imprinting on photo-cure resists. It helps the application and technology of nano-imprinting becoming more sophisticated. We rind that PDMS can be used to precisely replicate micro-to-nano-meter level micro-structures. Together with nano-particles and well-proportioned gas pressure, we can construct a perfect shape of micro-structures and achieve a conformal contact with the surface of base material. It increases the effective imprinting area significantly and improves the replication capability of the transfer. Meanwhile, the PDMS soft mould is easy for production and fast in replication, which reduces the cost remarkably. Furthermore, it has a low surface free energy and low viscosity to the resists. Integrating gas assisted nano-particles imprinting can be a great advantage in the process of micro-structure.en_US
dc.language.isoen_USen_US
dc.subjectPDMS soft molden_US
dc.subjectConformal contacten_US
dc.subjectFluid Imprintingen_US
dc.subjectResidual layeren_US
dc.titleFabrication of Microlens Arrays by Using Nano-Particle Fluid Imprinting Technologyen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1109/ICSPS.2009.188en_US
dc.identifier.journalPROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMSen_US
dc.citation.spage963en_US
dc.citation.epage+en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000275782600200en_US
dc.citation.woscount0en_US
顯示於類別:會議論文