標題: Seeding effect of SrBi2Ta2xO9 thin buffer layer on crystallization and electric properties of SrBi2Ta2O9 thin films
作者: Hsu, F. Y.
Lcu, C. C.
Chien, C. H.
Hu, C. T.
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2007
摘要: The seeding effects of the precrystallized (RTP 750 degrees C 30s) thin buffer layer, SrBi2Ta2xO9 (SBT, x=0.9, 1.0, and 1.1), regarding the structure, the morphology and the ferroelectric properties of the SrBi2Ta2O9 ferroelectric thin films on top of buffer layer, have been investigated. X-ray diffraction patterns revealed that the crystallinity of SrBi2Ta2O9 thin films were significant influenced by the buffer layers with various Ta contents. By adding a Ta deficient buffer layer, the preferred polar a-axis orientation and the uniformity of grain size within the SBT thin films were promoted. Meanwhile, the optimized ferroelectric properties were achieved from the SrBi2Ta1.8O9 buffered SrBi2Ta2O9 thin film, with maximum 2Pr values about 19.7 mu C/cm(2), which was almost 93% greater than that of specimen with the stoichiometric buffered one.
URI: http://dx.doi.org/10.1109/ISAF.2007.4393187
http://hdl.handle.net/11536/135154
ISBN: 978-1-4244-1333-1
ISSN: 1099-4734
DOI: 10.1109/ISAF.2007.4393187
期刊: 2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2
起始頁: 117
結束頁: +
顯示於類別:會議論文