標題: A compact in-situ ellipsometer using the liquid crystal variable retarder
作者: Shih, Wen-Tse
Hsieh, Mei-Li
Chao, Yu Faye
光電工程學系
Department of Photonics
關鍵字: Ellipsometry;in-situ ellipsometer;liquid crystal variable retarder
公開日期: 1-一月-2014
摘要: For monitoring the optical properties of material under a dynamical processing, we design a compact in-situ ellipsometry by using a liquid crystal (LC) phase retarder. Since the key issue of an accurate ellipsometer is the alignment of each optical component in the system, hence we not only proposed the alignment procedure, we also calibrated the phase retardation of LC retarder for this in-situ ellipsometry. The azimuths of polarizers and phase retarders can be aligned by the analytical solutions of the azimuthal deviations. The phase retardation can be directly determined by the intensity ratio technique.
URI: http://dx.doi.org/10.1117/12.2060567
http://hdl.handle.net/11536/135271
ISBN: 978-1-62841-227-7
ISSN: 0277-786X
DOI: 10.1117/12.2060567
期刊: PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS VIII
Volume: 9200
起始頁: 0
結束頁: 0
顯示於類別:會議論文


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