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dc.contributor.authorChen, Hsiao-Yunen_US
dc.contributor.authorShih, Da-Yuanen_US
dc.contributor.authorWei, Cheng-Changen_US
dc.contributor.authorTung, Chih-Hangen_US
dc.contributor.authorHsiao, Yi-Lien_US
dc.contributor.authorYu, Douglas Cheng-Huaen_US
dc.contributor.authorLiang, Yu-Chunen_US
dc.contributor.authorChen, Chihen_US
dc.date.accessioned2017-04-21T06:50:04Z-
dc.date.available2017-04-21T06:50:04Z-
dc.date.issued2013en_US
dc.identifier.isbn978-1-4799-0233-0en_US
dc.identifier.urihttp://hdl.handle.net/11536/135385-
dc.description.abstractAn immortal solder micro-bump (mu bump) electromigration (EM) lifetime has been demonstrated for 3D IC integration. This ultimate goal was achieved under strictly controlled conditions, including the optimal design of bump metallurgy, geometry, optimized processes, along with well-defined stressing conditions and manufacturing window. The current carrying capability and EM lifetime of mu bump have been investigated as functions of stressing conditions which are correlated with the degradation mechanisms. When stressed under the appropriate g conditions, all mu bump test samples survived prolonged stressing, some over 13,000 hours, without a failure. Cross-sectional analyses revealed that the entire solder joint almost all transformed into intermetallic compounds (IMCs) with very minor or no voids. The resistance plots showed an initial fast rise in resistance due to IMC formation, then gradually leveled off and eventually reached a steady state. The observed degradation mechanism is dominated by IMC formation, which is the same as that of the user conditions. On the other hand, void formation that eventually led to open failure was the dominant degradation mechanism when samples were aggressively stressed. In other words, when all other conditions were the same, the stressing conditions make a huge difference in determining between an almost immortal EM lifetime vs. a short lifetime using the same high quality mu bumps. The boundary that separates the stressing conditions is roughly defined and will be discussed. In addition, since full IMC mu bump will become inevitable in the future miniaturized solder interconnect structure, the EM behavior of IMC dominated mu bump has also been evaluated in this study. Under highly accelerated stressing conditions of 174 degrees C, at 1.6x10(5) A/cm(2) current density, the IMC dominated mu bumps were able to survive more than 600 hours and are still going strong. In comparison, solder mu bump failed quickly after just 107 hours when stressed under the same condition. This comparison study clearly demonstrated that IMC dominated joint has significantly higher current carrying capability than that of the solder joint. After reviewing all the data, we have concluded that the failure criteria for solder mu bump should be raised significantly higher than the 20% criteria traditionally used for the much larger C4 bumps.en_US
dc.language.isoen_USen_US
dc.titleGeneric Rules to Achieve Bump Electromigration Immortality for 3D IC Integrationen_US
dc.typeProceedings Paperen_US
dc.identifier.journal2013 IEEE 63RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC)en_US
dc.citation.spage49en_US
dc.citation.epage57en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000332764900008en_US
dc.citation.woscount2en_US
Appears in Collections:Conferences Paper