標題: INTEGRATED CMOS MEMS LIQUID CAPACITIVE INCLINOMETER
作者: Chiu, Yi
Chen, Bo-Ting
Hong, Hao-Chao
電機學院
College of Electrical and Computer Engineering
關鍵字: CMOS MEMS;inclinometer;liquid;packaging;dry-film resist (DFR);SU-8
公開日期: 2015
摘要: This paper reports a miniaturized CMOS MEMS capacitive inclinometer with dielectric liquid sensing medium in the reservoir on top of the CMOS substrate. A DFR/glass cap is bonded to the CMOS chip to form a reservoir for the sensing liquid. Rotating/tilting the sensor changes the electrode area covered by the liquid and leads to a change of capacitance. The packaged sensor had a dimension of 2.4x2.4x1.2 mm(3). Experimental results obtained by the on-chip readout circuit showed the proposed inclinometer had a sensitivity of 0.48 mV/deg in the linear range between +/- 60 degrees. With proper calibration, the linear range can be extended to +/- 90 degrees.
URI: http://hdl.handle.net/11536/135761
ISBN: 978-1-4799-8955-3
期刊: 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)
起始頁: 1152
結束頁: 1155
顯示於類別:會議論文