標題: | INTEGRATED CMOS MEMS LIQUID CAPACITIVE INCLINOMETER |
作者: | Chiu, Yi Chen, Bo-Ting Hong, Hao-Chao 電機學院 College of Electrical and Computer Engineering |
關鍵字: | CMOS MEMS;inclinometer;liquid;packaging;dry-film resist (DFR);SU-8 |
公開日期: | 2015 |
摘要: | This paper reports a miniaturized CMOS MEMS capacitive inclinometer with dielectric liquid sensing medium in the reservoir on top of the CMOS substrate. A DFR/glass cap is bonded to the CMOS chip to form a reservoir for the sensing liquid. Rotating/tilting the sensor changes the electrode area covered by the liquid and leads to a change of capacitance. The packaged sensor had a dimension of 2.4x2.4x1.2 mm(3). Experimental results obtained by the on-chip readout circuit showed the proposed inclinometer had a sensitivity of 0.48 mV/deg in the linear range between +/- 60 degrees. With proper calibration, the linear range can be extended to +/- 90 degrees. |
URI: | http://hdl.handle.net/11536/135761 |
ISBN: | 978-1-4799-8955-3 |
期刊: | 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
起始頁: | 1152 |
結束頁: | 1155 |
顯示於類別: | 會議論文 |